Videos

SPTS DRIE Tool Training: 01 - Introduction & Wafer Cleaning

Title

SPTS DRIE Tool Training: 01 - Introduction & Wafer Cleaning

Document Type

Video

Files

Date of this Version

7-15-2020

Comments

SPTS DRIE tool training, part 1

To get started at the QNF, click "Request Access" in the link below: https://iris.nano.upenn.edu/

Singh Center for Nanotechnology: https://www.nano.upenn.edu/

University of Pennsylvania: https://home.www.upenn.edu/

School of Engineering & Applied Sciences: https://www.seas.upenn.edu/

Facility

Quattrone Nanofabrication Facility

Keywords

DRIE, Deep reactive ion etch, STPS, Rapier, Nanofabrication

Streaming Media

SPTS DRIE Tool Training: 01 - Introduction & Wafer Cleaning

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