Spin Coating Thick Resist

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Quattrone Nanofabrication Facility
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SU8 resist spin coating
Biochemical and Biomolecular Engineering
Bioimaging and Biomedical Optics
Biological Engineering
Biomaterials
Biomechanical Engineering
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Biomedical Devices and Instrumentation
Biomedical Engineering and Bioengineering
Electrical and Electronics
Electromagnetics and Photonics
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Nanotechnology Fabrication
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Semiconductor and Optical Materials
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Abstract

Procedure for spin coating very thick resist such as SU8.

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2016-03-01
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