Standard Operating Procedures
Document Type
Other
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Date of this Version
11-2-2021
Facility
Quattrone Nanofabrication Facility
Summary/Description
Explorer14 standard operating procedure
Creative Commons License
This work is licensed under a Creative Commons Attribution-Share Alike 4.0 International License.
Keywords
sputtering
Recommended Citation
Yamamoto, Hiromichi, "Magnetron Sputtering Explorer14 standard operating procedure" (2021). Standard Operating Procedures. Book 8.
https://repository.upenn.edu/scn_sop/8