Standard Operating Procedures
Document Type
Other
Files
Download
Download Full Text (1.9 MB)
Date of this Version
12-22-2022
Facility
Quattrone Nanofabrication Facility
Summary/Description
SOP for RENA Compass Spin Rinse Dryer Stack in QNF
Keywords
SRD, spin rinse dryer, RCA clean, SRD-01
Recommended Citation
Keenan, Kyle, "RENA Compass SRD standard operating procedure" (2022). Standard Operating Procedures. Book 26.
https://repository.upenn.edu/scn_sop/26