RENA Compass SRD standard operating procedure
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Penn collection
Standard Operating Procedures
Quattrone Nanofabrication Facility
Quattrone Nanofabrication Facility
Degree type
Discipline
Subject
SRD
spin rinse dryer
RCA clean
SRD-01
Nanoscience and Nanotechnology
spin rinse dryer
RCA clean
SRD-01
Nanoscience and Nanotechnology
Funder
Grant number
License
Copyright date
Distributor
Related resources
Author
Keenan, Kyle
Contributor
Abstract
SOP for RENA Compass Spin Rinse Dryer Stack in QNF
Advisor
Date Range for Data Collection (Start Date)
Date Range for Data Collection (End Date)
Digital Object Identifier
Series name and number
Publication date
2022-12-22