Standard Operating Procedures
Document Type
Working Paper
Files
Download Full Text (1.9 MB)
Date of this Version
1-4-2023
Facility
Quattrone Nanofabrication Facility
Summary/Description
Standard Operating Procedure for the Lesker PVD75 E-beam/Thermal Evaporator (PVD-02) located at the Quattrone Nanofabrication Facility within the Singh Center for Nanotechnology at the University of Pennsylvania
Creative Commons License
This work is licensed under a Creative Commons Attribution 3.0 License.
Keywords
physical vapor deposition, e-beam evaporation, thermal evaporation
Recommended Citation
Barth, David S. and Röhr, Jason A., "Lesker PVD75 E-beam/Thermal Evaporator (PVD-02) Standard Operating Procedure" (2023). Standard Operating Procedures. Book 25.
https://repository.upenn.edu/scn_sop/25
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