Standard Operating Procedures

Document Type

Working Paper

Files

Download

Download Full Text (1.9 MB)

Date of this Version

1-4-2023

Facility

Quattrone Nanofabrication Facility

Summary/Description

Standard Operating Procedure for the Lesker PVD75 E-beam/Thermal Evaporator (PVD-02) located at the Quattrone Nanofabrication Facility within the Singh Center for Nanotechnology at the University of Pennsylvania

Creative Commons License

Creative Commons Attribution 3.0 License
This work is licensed under a Creative Commons Attribution 3.0 License.

Keywords

physical vapor deposition, e-beam evaporation, thermal evaporation

Lesker PVD75 E-beam/Thermal Evaporator (PVD-02) Standard Operating Procedure

Share

COinS
 
 

To view the content in your browser, please download Adobe Reader or, alternately,
you may Download the file to your hard drive.

NOTE: The latest versions of Adobe Reader do not support viewing PDF files within Firefox on Mac OS and if you are using a modern (Intel) Mac, there is no official plugin for viewing PDF files within the browser window.