Standard Operating Procedures

Document Type

Other

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Date of this Version

10-5-2022

Facility

Quattrone Nanofabrication Facility

Summary/Description

Standard Operating Procedure for the Lesker PVD75 E-beam Evaporator (PVD-04) located at the Quattrone Nanofabrication Facility within the Singh Center for Nanotechnology at the University of Pennsylvania

Keywords

e-beam evaporation, physical vapor deposition

Lesker PVD75 E-beam Evaporator (PVD-04) Standard Operating Procedure

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