Standard Operating Procedures
Document Type
Other
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Date of this Version
10-5-2022
Facility
Quattrone Nanofabrication Facility
Summary/Description
Standard Operating Procedure for the Lesker PVD75 E-beam Evaporator (PVD-04) located at the Quattrone Nanofabrication Facility within the Singh Center for Nanotechnology at the University of Pennsylvania
Keywords
e-beam evaporation, physical vapor deposition
Recommended Citation
Jones, David J. and Röhr, Jason A., "Lesker PVD75 E-beam Evaporator (PVD-04) Standard Operating Procedure" (2022). Standard Operating Procedures. Book 23.
https://repository.upenn.edu/scn_sop/23
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