
Standard Operating Procedures
Title
Document Type
Review
Files
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Download Full Text (2.8 MB)
Date of this Version
12-8-2021
Facility
Quattrone Nanofabrication Facility
Summary/Description
The standard operating procedure of MET-02
Creative Commons License
This work is licensed under a Creative Commons Attribution-Share Alike 4.0 International License.
Keywords
KLA Tencor 2D/3D Stylus Profiler and stress measurement tool
Recommended Citation
Yamamoto, Hiromichi, "SOP of MET-02" (2021). Standard Operating Procedures. Book 13.
https://repository.upenn.edu/scn_sop/13