Standard Operating Procedures

Document Type

Other

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Date of this Version

11-15-2021

Facility

Quattrone Nanofabrication Facility

Summary/Description

The ABM mask aligner is a manual top-side mask aligner that can accommodate up to 100mm substrates. It can also be used for aligning PDMS components for PDMS-to-PDMS bonding.

Creative Commons License

Creative Commons Attribution-Share Alike 4.0 International License
This work is licensed under a Creative Commons Attribution-Share Alike 4.0 International License.

Keywords

ABM mask aligner lithography

ABM Mask Aligner standard operating procedure

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