Standard Operating Procedures
Document Type
Other
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Date of this Version
11-15-2021
Facility
Quattrone Nanofabrication Facility
Summary/Description
The ABM mask aligner is a manual top-side mask aligner that can accommodate up to 100mm substrates. It can also be used for aligning PDMS components for PDMS-to-PDMS bonding.
Creative Commons License
This work is licensed under a Creative Commons Attribution-Share Alike 4.0 International License.
Keywords
ABM mask aligner lithography
Recommended Citation
Johnston, Eric, "ABM Mask Aligner standard operating procedure" (2021). Standard Operating Procedures. Book 10.
https://repository.upenn.edu/scn_sop/10