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  Filmetrics Profilm3D (MET-05) Standard Operating Procedure

  David S. Barth

  Standard Operating Procedure for the Filmetrics Profilm3D Optical Profilometer/White Light Interferometer

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  Lesker PVD75 E-beam/Thermal Evaporator (PVD-02) Standard Operating Procedure

  David S. Barth and Jason A. Röhr

  Standard Operating Procedure for the Lesker PVD75 E-beam/Thermal Evaporator (PVD-02) located at the Quattrone Nanofabrication Facility within the Singh Center for Nanotechnology at the University of Pennsylvania

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  Anatech SCE-108 Barrel Asher standard operating procedure

  Mohsen Azadi

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  Filmetrics F40 Standard Operating Procedure

  Mohsen Azadi

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  Oxford PlasmaLab 100 PECVD standard operating procedure

  Mohsen Azadi

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  PlasmaPro 100 Cobra ICP standard operating procedure

  Mohsen Azadi

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  Sandvik LPCVD and anneal tubes standard operating procedure

  Mohsen Azadi

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  Explorer 14 Magnetron Sputterer (PVD-05) Standard Operating Procedure

  Mohsen Azadi and Jason Alexander Röhr

  Standard Operating Procedure for the Explorer 14 Magnetron Sputterer (PVD-05) located at the Quattrone Nanofabrication Facility within the Singh Center for Nanotechnology at the University of Pennsylvania

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  Elionix ELS-7500EX Electron Beam Lithography Standard Operating Procedure

  David S. Barth

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  Lesker PVD75 E-beam Evaporator (PVD-04) Standard Operating Procedure

  David J. Jones and Jason A. Röhr

  Standard Operating Procedure for the Lesker PVD75 E-beam Evaporator (PVD-04) located at the Quattrone Nanofabrication Facility within the Singh Center for Nanotechnology at the University of Pennsylvania

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  RENA Compass SRD standard operating procedure

  Kyle Keenan

  SOP for RENA Compass Spin Rinse Dryer Stack in QNF

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  Cambridge Nanotech S200 ALD standard operating procedure

  Mohsen Azadi

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  Oxford PlasmaLab 80 Plus RIE standard operating procedure

  Mohsen Azadi

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  SPTS Si DRIE standard operating procedure

  Mohsen Azadi

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  XeF2 SPTS Xactix Isotropic Etcher standard operating procedure

  Mohsen Azadi

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  ABM Mask Aligner standard operating procedure

  Eric Johnston

  The ABM mask aligner is a manual top-side mask aligner that can accommodate up to 100mm substrates. It can also be used for aligning PDMS components for PDMS-to-PDMS bonding.

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  IPG IX-255 Excimer Laser Micromachining Standard Operating Procedure

  Eric Johnston

  The IPG IX-255 Excimer Laser is a highly flexible UV laser micromachining system for multi-purpose, R&D and production applications. The system combines a Class 1 workstation integrated with a proprietary UV (193nm) laser and beam shape selector (infinitely variable rectangular and discrete circular) to machine transparent samples such as plastic, glass, and PDMS.

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  Magnetron Sputtering Explorer14 standard operating procedure

  Hiromichi Yamamoto

  Explorer14 standard operating procedure

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  SOP of BE-04

  Hiromichi Yamamoto

  The standard operating procedure of BE-04

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  SOP of MET-01

  Hiromichi Yamamoto

  The standard operating procedure of MET-01

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  SOP of MET-02

  Hiromichi Yamamoto

  The standard operating procedure of MET-02

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  SOP of MET-03

  Hiromichi Yamamoto

  The standard operating procedure of MET-03

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  SOP of MET-04

  Hiromichi Yamamoto

  The standard operating procedure of MET-04

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  Standard Operating Procedures of Tools in Quattrone Nanofabrication Facility

  Hiromichi Yamamoto