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ABM Mask Aligner standard operating procedure
Eric Johnston
The ABM mask aligner is a manual top-side mask aligner that can accommodate up to 100mm substrates. It can also be used for aligning PDMS components for PDMS-to-PDMS bonding.
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IPG IX-255 Excimer Laser Micromachining Standard Operating Procedure
Eric Johnston
The IPG IX-255 Excimer Laser is a highly flexible UV laser micromachining system for multi-purpose, R&D and production applications. The system combines a Class 1 workstation integrated with a proprietary UV (193nm) laser and beam shape selector (infinitely variable rectangular and discrete circular) to machine transparent samples such as plastic, glass, and PDMS.
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Magnetron Sputtering Explorer14 standard operating procedure
Hiromichi Yamamoto
Explorer14 standard operating procedure
