-
Lesker PVD75 E-beam/Thermal Evaporator (PVD-02) Standard Operating Procedure
David S. Barth and Jason A. Röhr
Standard Operating Procedure for the Lesker PVD75 E-beam/Thermal Evaporator (PVD-02) located at the Quattrone Nanofabrication Facility within the Singh Center for Nanotechnology at the University of Pennsylvania
-
Explorer 14 Magnetron Sputterer (PVD-05) Standard Operating Procedure
Mohsen Azadi and Jason Alexander Röhr
Standard Operating Procedure for the Explorer 14 Magnetron Sputterer (PVD-05) located at the Quattrone Nanofabrication Facility within the Singh Center for Nanotechnology at the University of Pennsylvania
-
Lesker PVD75 E-beam Evaporator (PVD-04) Standard Operating Procedure
David J. Jones and Jason A. Röhr
Standard Operating Procedure for the Lesker PVD75 E-beam Evaporator (PVD-04) located at the Quattrone Nanofabrication Facility within the Singh Center for Nanotechnology at the University of Pennsylvania
-
RENA Compass SRD standard operating procedure
Kyle Keenan
SOP for RENA Compass Spin Rinse Dryer Stack in QNF
-
ABM Mask Aligner standard operating procedure
Eric Johnston
The ABM mask aligner is a manual top-side mask aligner that can accommodate up to 100mm substrates. It can also be used for aligning PDMS components for PDMS-to-PDMS bonding.
-
IPG IX-255 Excimer Laser Micromachining Standard Operating Procedure
Eric Johnston
The IPG IX-255 Excimer Laser is a highly flexible UV laser micromachining system for multi-purpose, R&D and production applications. The system combines a Class 1 workstation integrated with a proprietary UV (193nm) laser and beam shape selector (infinitely variable rectangular and discrete circular) to machine transparent samples such as plastic, glass, and PDMS.
-
Magnetron Sputtering Explorer14 standard operating procedure
Hiromichi Yamamoto
Explorer14 standard operating procedure
