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Standard Operating Procedures

Standard Operating Procedures

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Anatech SCE-108 Barrel Asher standard operating procedure

Mohsen Azadi
Cambridge Nanotech S200 ALD standard operating procedure

Mohsen Azadi
Oxford PlasmaLab 100 PECVD standard operating procedure

Mohsen Azadi
Oxford PlasmaLab 80 Plus RIE standard operating procedure

Mohsen Azadi
SPTS Si DRIE standard operating procedure

Mohsen Azadi
ABM Mask Aligner standard operating procedure

Eric Johnston

The ABM mask aligner is a manual top-side mask aligner that can accommodate up to 100mm substrates. It can also be used for aligning PDMS components for PDMS-to-PDMS bonding.
Magnetron Sputtering Explorer14 standard operating procedure

Hiromichi Yamamoto

Explorer14 standard operating procedure
Standard Operating Procedures of Tools in Quattrone Nanofabrication Facility

Hiromichi Yamamoto