Document Type

Technical Report

Date of this Version

10-16-2107

Facility

Quattrone Nanofabrication Facility

Abstract

Test for annealing of SU-8 surface cracks by post-development bake at various temperatures and times.

Creative Commons License

Creative Commons Attribution-Share Alike 4.0 License
This work is licensed under a Creative Commons Attribution-Share Alike 4.0 License.

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Date Posted: 20 October 2017

 

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