Protocols and Reports
Document Type
Technical Report
Date of this Version
10-16-2017
Facility
Quattrone Nanofabrication Facility
Abstract
Test for annealing of SU-8 surface cracks by post-development bake at various temperatures and times.
Creative Commons License
This work is licensed under a Creative Commons Attribution-Share Alike 4.0 International License.
Date Posted: 20 October 2017