
Protocols and Reports
Document Type
Technical Report
Date of this Version
10-20-2017
Facility
Quattrone Nanofabrication Facility
Abstract
To test for annealing of SU-8 surface cracks by post-development bake at various temperatures and times
Creative Commons License
This work is licensed under a Creative Commons Attribution-Share Alike 4.0 License.
Date Posted: 20 October 2017