Document Type

Technical Report

Date of this Version

2-7-2017

Comments

The purpose of this document is to show how to use the surface profilometer to measure residual film stress in deposited thin films.

Facility

Quattrone Nanofabrication Facility

Share

COinS
 

Date Posted: 20 February 2017

 

To view the content in your browser, please download Adobe Reader or, alternately,
you may Download the file to your hard drive.

NOTE: The latest versions of Adobe Reader do not support viewing PDF files within Firefox on Mac OS and if you are using a modern (Intel) Mac, there is no official plugin for viewing PDF files within the browser window.