Singh Center for Nanotechnology
Protocols and Reports
Examination of the Stoney Equation and a Practical Determination of the Error in Residual Film Stress Measurements
Roman Mays, University of PennsylvaniaFollow
The purpose of this document is to show how common practical errors in substrate thickness and film thickness impact the resulting residual stress measurements using an analysis of the Stoney Equation.
Quattrone Nanofabrication Facility
Since February 20, 2017
Nanoscience and Nanotechnology Commons
Date Posted: 20 February 2017
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