Protocols and Reports
Document Type
Technical Report
Date of this Version
2-20-2017
Facility
Quattrone Nanofabrication Facility
Date Posted: 20 February 2017
Technical Report
2-20-2017
Quattrone Nanofabrication Facility
Date Posted: 20 February 2017
Comments
The purpose of this document is to show how common practical errors in substrate thickness and film thickness impact the resulting residual stress measurements using an analysis of the Stoney Equation.