Examination of the Stoney Equation and a Practical Determination of the Error in Residual Film Stress Measurements
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Quattrone Nanofabrication Facility
Quattrone Nanofabrication Facility
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Nanoscience and Nanotechnology
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2017-02-20
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The purpose of this document is to show how common practical errors in substrate thickness and film thickness impact the resulting residual stress measurements using an analysis of the Stoney Equation.