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Examination of the Stoney Equation and a Practical Determination of the Error in Residual Film Stress Measurements
Roman Mays, University of PennsylvaniaFollow
Technical Report
2-20-2017
The purpose of this document is to show how common practical errors in substrate thickness and film thickness impact the resulting residual stress measurements using an analysis of the Stoney Equation.
Quattrone Nanofabrication Facility
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Since February 20, 2017
Nanoscience and Nanotechnology Commons
Date Posted: 20 February 2017
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The purpose of this document is to show how common practical errors in substrate thickness and film thickness impact the resulting residual stress measurements using an analysis of the Stoney Equation.