Document Type
Technical Report
Date of this Version
8-1-2016
Facility
Quattrone Nanofabrication Facility
Abstract
The PS-rich and neutral PS-b-PMMA block copolymer (BCP) films were spin coated on the neutral random copolymer hydroxyl-terminated PS-r-PMMA layers grafted on the native oxide and 50 nm thick PECVD amorphous silicon oxide layers. Relationship between the grafting density of BCP and surface density of hydroxyl moiety on silicon oxide is discussed. Furthermore, optimization of annealing BCP films is reported, and wetted and de-wetted BCP films are shown in optical microscope images. In addition, finger print and nanopore structures of BCP films are also indicated in SEM images.
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Keywords
directed self-assembly, block-copolymer, grafting, hydroxylated silicon oxide
Included in
Biochemical and Biomolecular Engineering Commons, Biological and Chemical Physics Commons, Membrane Science Commons, Nanoscience and Nanotechnology Commons, Other Chemistry Commons, Physical Chemistry Commons, Polymer and Organic Materials Commons, Polymer Chemistry Commons, Polymer Science Commons
Date Posted: 01 August 2016