Document Type
Technical Report
Date of this Version
3-3-2016
Facility
Quattrone Nanofabrication Facility
Creative Commons License
This work is licensed under a Creative Commons Attribution-Share Alike 4.0 License.
Keywords
KOH etching Silicon
Included in
Biological and Chemical Physics Commons, Engineering Physics Commons, Inorganic Chemistry Commons, Materials Chemistry Commons, Membrane Science Commons, Other Chemical Engineering Commons, Other Materials Science and Engineering Commons, Physical Chemistry Commons, Structural Materials Commons
Date Posted: 03 March 2016
This document has been peer reviewed.