Quattrone Nanofabrication Facility
The Quattrone Nanofabrication Facility (QNF), is an open access user facility that provides equipment resources and staff assistance for building devices and structures at the micro- and nanoscale. In addition to supporting academic research, we serve as a regional resource in welcoming all projects from other universities, industry and national laboratories.
Books from 2022
Elionix ELS-7500EX Electron Beam Lithography Standard Operating Procedure, David S. Barth
KJLC PVD75 E-beam Evaporator (PVD-04) standard operating procedure, David J. Jones
Books from 2021
Oxford PlasmaLab 100 PECVD standard operating procedure, Mohsen Azadi
Oxford PlasmaLab 80 Plus RIE standard operating procedure, Mohsen Azadi
SPTS Si DRIE standard operating procedure, Mohsen Azadi
Improving Healthspan through Patient-Derived Artificial Organs from Induced Pluripotent Stem Cells and Two-Photon Polymerization, Connor Espenshade
Effect of Developer Temperature on Photoresist Contrast in Grayscale Lithography, Dale Farnan and George Patrick Watson
ABM Mask Aligner standard operating procedure, Eric Johnston
IPG IX-255 Excimer Laser Micromachining Standard Operating Procedure, Eric Johnston
Optimization of Bilayer Lift-Off Process to Enable the Gap Size of 1μm Using LOR 3A and S1813, Yeonjoon Suh and George Patrick Watson
How to cleave wafers: LatticeGear protocol, Shenshen Wan and George Patrick Watson
Magnetron Sputtering Explorer14 standard operating procedure, Hiromichi Yamamoto
SOP of BE-04, Hiromichi Yamamoto
SOP of MET-01, Hiromichi Yamamoto
SOP of MET-02, Hiromichi Yamamoto
SOP of MET-03, Hiromichi Yamamoto
SOP of MET-04, Hiromichi Yamamoto
Videos from 2020
How to Make Chips with Nanofabrication | University of Pennsylvania, Lauren Hoang, Abbas Idris, Dale Farnan, Felice Macera, Ashely Wallace, David Jones, and Gyuseok Kim
Inkjet Printing of Graphene, Lauren Hoang, Hiromichi Yamamoto, Yeonjoon Suh, and George Patrick Watson
E-beam Evaporator (PVD75, Kurt J. Lesker Company) Tool Tutorial, David Jones
Filmetrics F40 Tutorial, David Jones
Heidelberg DWL66+ Tool Training: 01 - Introduction, David Jones
Heidelberg DWL66+ Tool Training: 02 - Loading the Sample, David Jones
Heidelberg DWL66+ Tool Training: 03 - Running the Exposure, David Jones
Oxford 80+ RIE Tool Training, David Jones
Spinner Training | Quattrone Nanofabrication Facility, David Jones
SPTS DRIE Tool Training: 01 - Introduction & Wafer Cleaning, David Jones
SPTS DRIE Tool Training: 02 - Operating The Tool, David Jones
Progress Report III: Fabrication of Nanopores in Silicon Nitride Membranes using Electron-beam Lithography, Mingxuan Ma and Hiromichi Yamamoto
Stress in Silicon Oxide Thin Films Grown by Dry Thermal Oxidation, Manisha Muduli and Hiromichi Yamamoto
Thin Dry Silicon Oxide Films Grown by Thermal Oxidation, Manisha Muduli and Hiromichi Yamamoto
Quantum Dots and QD-based Devices: Nanotechnology Enabled by Chemistry, George Patrick Watson
Submissions from 2019
Fabrication of High Aspect Ratio Nanopillars using Metal Assisted Chemical Etching, Rimjhim Chaudhary and Hiromichi Yamamoto
Fabrication of Organic Thin Film Transistors using Inkjet Printing of PEDOT:PSS, Sourajit Das, Akshaya Venkatakrishnan, Hiromichi Yamamoto, and George Patrick Watson
YES Oven Tutorial: HMDS Vapor Prime, Saarah Hall and Eric D. Johnston
Characterization and Optimization of Parylene-C deposition process using SCS Parylene coater, Hannah Hastings, Eric D. Johnston, and Gyuseok Kim
Microfluidics for Medical Research, Eric D. Johnston
LayoutEditor Training: 01 - Introduction, David Jones
LayoutEditor Training: 02 - Upload License & Set Display, David Jones
LayoutEditor Training: 03 - Setting Grid & Zoom, David Jones
LayoutEditor Training: 04 - Drawing Boxes & Active Mode, David Jones
LayoutEditor Training: 05 - Selecting & Deleting Objects, David Jones
LayoutEditor Training: 06 - Properties, David Jones
LayoutEditor Training: 07 - Cells & Circles, David Jones
LayoutEditor Training: 08 - Cell Array, David Jones
LayoutEditor Training: 09 - Paths & Polygons, David Jones
LayoutEditor Training: 10 - Text, David Jones
LayoutEditor Training: 11 - Move/Scale & Copy/Move, David Jones
LayoutEditor Training: 12 - Layers, Part 1, David Jones
LayoutEditor Training: 13 - Layers, Part 2, David Jones
LayoutEditor Training: 14 - Integrated Practice, David Jones
LayoutEditor Training: 15 - Bonus #1 - MA6 Alignment Marks, David Jones
LayoutEditor Training: 16 - Bonus #2 - ABM Alignment Marks, David Jones
LayoutEditor Training: 17 - Bonus #3 - Boolean Ops, David Jones
Progress Report I: Fabrication of Nanopores in Silicon Nitride Membranes using Self-Assembly of PS-b-PMMA, Unnati Joshi, Vishal Venkatesh, and Hiromichi Yamamoto
Suss MicroTec MA6 Mask Aligner Training: First Mask, Ifeoluwa Popoola and Eric D. Johnston
Training Video for Using Long-Pass Filter on Suss MicroTec MA6 Mask Aligner, Ifeoluwa Popoola and Eric D. Johnston
Post-process Protocol of Photomask for UV lithography: Wet etch and Strip, Ifeoluwa Popoola and David Jones
Influence of NaOH Concentration on Transfer Process of Graphene, Francisco Saldana, Chengyu Wen, and George Patrick Watson
Influence of flow rate, nozzle speed, pitch and the number of passes on the thickness of S1805 photoresist in SUSS MicroTec AS8 spray coater, Rohan Sanghvi and Gyuseok Kim
Effect of Annealing on the Contact Resistance of Aluminum on a p-type Substrate, Shrey Shah and George Patrick Watson
Optimization of Ultrasonic Aluminum Wire Bonding on Chromium and Gold Surfaces Using K&S Wedge Wire Bonder, Ryan Tetro and Gyuseok Kim
Progress Report II: Fabrication of Nanopores in Silicon Nitride Membrane using Self-Assembly of PS-b-PMMA: Nanopore Pattern Transfer to the Si substrate, Kodai Watanabe, Unnati Joshi, and Hiromichi Yamamoto
Correction of pattern size deviations in the fabrication of photomasks made with a laser direct-writer, Ningzhi Xie and George Patrick Watson
Dynamics of Directed Self-Assembly of PS-b-PMMA during Solvent Annealing, Hiromichi Yamamoto
Reactive Ion Etching Selectivity of Si/SiO2: Comparing of two fluorocarbon gases CHF3 and CF4, Meiyue Zhang and Pat Watson
CdSe Quantum Dots Synthesis Laboratory Course for High School Students, Danlin Zuo, Gyuseok Kim, and David Jones
Submissions from 2018
CSAR 62 Spin Curve, Mohsen Azadi, Georgia Griggs, Glen de Villafranca, and Gerald Lopez
Comparison between Silicon Nanopillars Prepared by Bosch Process and Metal Assisted Chemical Etching, Rimjhim Chaudhary
Surface Roughness Dependence of Inkjet Printing of Ag Nanoparticles, Ming Yuan Chuang
Surface Treatment and Adhesion Study, Maegan DeLessio and Pat Watson
Alignment Error Examination of Elionix E-Beam Writer ELS-7500EX, Yangshanshan Li
DisCharge: Spin-On Anti-Charging Agent for Electron Beam Lithography, Gerald G. Lopez Ph.D. and Glen de Villafranca
KMPR Master Fabrication Protocol, Justin Wen
Submissions from 2017
Inkjet Printing of Ag Nanoparticles using Dimatix Inkjet Printer, No 1, Amal Abbas and Inayat Bajwa
CSAR 62 Contrast Curves, Mohsen Azadi, Georgia Griggs, Glen de Villafranca, and Gerald Lopez
MicroChem S1818 Contrast Curve Optimization, Mohsen Azadi and Gerald Lopez
Inkjet Printing of Ag Nanoparticles using Dimatix Inkjet Printer, No 2, Ming Yuan Chuang
Mask Flaw Propagation Using 360nm Long Pass Filter, Ram Surya Gona and Eric D. Johnston
SU-8 Post Development Bake (Hard Bake) Study, Ram Surya Gona and Eric D. Johnston
Video Tutorial for ABM Mask Aligner, Including Alignment, Ram Surya Gona and Abhishek Kalpattu
Effect of Post-Development Bake on Adhesion of SU-8, Eric D. Johnston and Ram Surya Gona
PDMS Shrinkage, Abhishek Kalpattu
Characterization of Sputtering Platinum Using the Denton Explorer-14 System, Roman Mays
Characterization of Sputtering Copper Using the Denton Explorer-14 System, Roman Mays and Meredith Metzler
Plasma Enhanced Chemical Vapor Deposition (PECVD) of Silicon Dioxide (SiO2) Using Oxford Instruments System 100 PECVD, Meredith Metzler and Raj Patel
Plasma Enhanced Chemical Vapor Deposition (PECVD) of Silicon Nitride (SiNx) Using Oxford Instruments System 100 PECVD, Meredith Metzler and Raj Patel
Optimization of Plasma Enhanced Chemical Vapor Deposition (PECVD) of Amorphous Silicon (a-Si) Using Oxford Instruments System 100 with Taguchi L9 Based Design of Experiments (DOE), Raj Patel and Meredith Metzler
Troubleshooting on the sample preparation for SU-8 to SU-8 wafer level bonding, Samagata Sen, Saurav Bose, and Shubham Sethi
Submissions from 2016
Spin Curves for MicroChem S1800 (1805, 1813, 1818) Series Positive Resist, Mohsen Azadi and Gerald G. Lopez
Characterization of Silicon Deep Reactive Ion Etching Using the SPTS Rapier, Mohsen Azadi, Meredith Metzler, and Gerald G. Lopez
Characterization of Silicon Dioxide (SiO2) and Microchem S1800 Resist Etching Using Oxford 80 Plus RIE, Mohsen Azadi, Meredith Metzler, and Gerald G. Lopez
KOH etching of (100) Si wafer, No 1, Inayat Bajwa
KOH etching of (100) Si wafer, No 2, Inayat Bajwa
Metal Assisted Chemical Etching, Inayat Bajwa
SUSS MicroTec MA6 Gen3 - S1805 Contrast Curve Data, Jonathan Bryan and GERALD G. LOPEZ
SUSS MicroTec MA6 Gen3 - S1813 Contrast Curve Data, Jonathan Bryan, Steven Wood, and Gerald G. Lopez
Self-Aligned Double Pattern, No1, Yinong Cao