The Nanoscale Characterization Facility supports current generation tools for electron-beam and ion-beam analyses that serve Penn, as well as other university and industry users in the Philadelphia region. The new facility comprises eight rooms specially designed to host state-of-the-art electron and atomic force microscopes. The facility includes a sample preparation lab with complete coating and plasma cleaning capabilities, a computer lab for offline image and data analysis, and office and meeting space for staff and industrial users. The facility also maintains an ion scattering laboratory featuring a 5.1 MeV ion accelerator for thin film characterization and ion implantation.