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We report a technique for the assembly of bottom-up nanomechanical devices. This technique employs the dielectrophoretic manipulation of nanostructures within a multiple layer lithography process. Mechanical resonators were specifically produced by assembling and clamping tubular carbon fibers onto prefabricated pads. Our preliminary results showed that an assembled cantilevered fiber with length L = 5 µm and width of W = 180 nm possessed a resonant frequency of f = 1.17 MHz. A shorter L = 3-µm-long singly clamped resonator of similar width showed a resonance of f = 3.12 MHz. This frequency range is in agreement with the low gigapascal bending moduli previously reported for carbon structures showing extensive volume defects. This technology would allow the integration of bottom-up nanostructures with other more established fabrication processes, thus allowing the deployment of engineered nanodevices in integrated systems.
Detectors, materials processing, microelectromechanical systems, microresonators, nanotechnology
Evoy, S., Riegelman, M. A., Naguib, N., Ye, H., Jaroenapibal, P., Luzzi, D. E., & Gogotsi, Y. (2005). Dielectrophoretic Assembly of Carbon Nanofiber Nanoelectromechanical Devices. Retrieved from https://repository.upenn.edu/mse_papers/76
Date Posted: 27 February 2006
This document has been peer reviewed.