Departmental Papers (MSE)

Document Type

Journal Article

Date of this Version

December 2007

Abstract

We present a quantitative study of the distortion from a three-term diamond-like structure fabricated in SU8 polymer by four-beam holographic lithography. In the study of the refraction effect, theory suggests that the lattice in SU8 should be elongated in the [111] direction but have no distortion in the (111) plane, and each triangular-like hole array in the (111) plane would rotate by ~30º away from that in air. Our experiments agree with the prediction on the periodicity in the (111) plane and the rotation due to refraction effect, however, we find that the film shrinkage during lithographic process has nearly compensated the predicted elongation in the [111] direction. In study of photonic bandgap (PBG) properties of silicon photonic crystals templated by the SU8 structure, we find that the distortion has decreased quality of PBG.

Comments

Reprinted from Optics Express, Volume 15 Issue 25, December 2007, pages 16546-16560.

This paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/DirectPDFAccess/7E400F28-BDB9-137E-C0D29BEF2C4898B9_148214.pdf?da=1&id=148214&seq=0&CFID=16347157&CFTOKEN=19656475. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.

Keywords

holography, instrumentation, measurement, and metrology, refraction, physical optics, interference, materials, photonic crystals

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Date Posted: 15 January 2008

This document has been peer reviewed.