Departmental Papers (MEAM)

Document Type

Journal Article

Date of this Version

November 1995


Copyright (1995) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. Reprinted in Review of Scientific Instruments, Volume 66, Issue 11, November 1995, pages 5266-5271.
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NOTE: At the time of publication, author Robert W. Carpick was affiliated with the University of Wisconsin. Currently (June 2007), he is a faculty member in the Department of Mechanical Engineering and Applied Mechanics at the University of Pennsylvania.


A new atomic force microscope (AFM) that operates in ultrahigh vacuum (UHV) is described. The sample is held fixed with spring clamps while the AMF cantilever and deflection sensor are scanned above it. Thus, the sample is easily coupled to a liquid nitrogen cooled thermal reservoir which allows AFM operation from ≈ 100 K to room temperature. AFM operation above room temperature is also possible. The microscope head is capable of coarse x-y positioning over millimeter distances so that AFM images can be taken virtually anywhere upon a macroscopic sample. The optical beam deflection scheme is used for detection, allowing simultaneous normal and lateral force measurements. The sample can be transferred from the AFM stage to a low energy electron diffraction/Auger electron spectrometer stage for surface analysis. Atomic lattice resolution AFM images taken in UHV are presented at 110, 296, and 430 K.


design, microscopes, spatial resolution, temperature range 0065-0273 K, temperature range 0273-0400 K, ultrahigh vacuum, forces, temperature range 400-100 K



Date Posted: 25 June 2007

This document has been peer reviewed.