Departmental Papers (MEAM)

Document Type

Conference Paper

Date of this Version



Suggested Citation:
Chengjie Zuo, Jan Van der Spiegel, and Gianluca Piazza. "1.5-GHz CMOS Voltage-Controlled Oscillator Based On Thickness-Field-Excited Piezoelectric AlN Contour-Mode MEMS Resonators" 2010 IEEE Custom Integrated Circuits Conference (CICC 2010) (2010).

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This paper reports on the first demonstration of aluminum nitride (AIN) piezoelectric logic switches that were fabricated with ultra-thin (100nm) AIN films and exhibit a 1 mV threshold voltage via the body-biasing scheme. The application of a relatively low (< 6 V) fixed potential to the body terminal of a 4-terminal switch has been cycled to > 109 cycles and, although the contact resistance was found to be high (~ 1 MΩ), the nano-films have functioned throughout to show high piezoelectric nano-film reliability.



Date Posted: 09 November 2010

This document has been peer reviewed.