Date of this Version
An experimental and theoretical investigation of low Reynolds number, high subsonic Mach number, compressible gas flow in channels is presented. Nitrogen, helium, and argon gases were used. The channels were microfabricated on silicon wafers and were typically 100 μm wide, 104 μm long, and ranged in depth from 0.5 to 20 μm. The Knudsen number ranged from 10-3 to 0.4. The measured friction factor was in good agreement with theoretical predictions assuming isothermal, locally fully developed, first-order, slip flow.
Harley, John C.; Huang, Yufend; Bau, Haim H.; and Zemel, Jay N., "Gas Flow in Micr-Channels" (1994). Departmental Papers (MEAM). 196.
Date Posted: 17 August 2010
This document has been peer reviewed.