Departmental Papers (MEAM)

Document Type

Journal Article

Date of this Version



Suggested Citation:
Harley, John C., Yufend Huang, Haim H. Bau and Jay N. Zemel. (1994) Gas flow in micro-channels. Journal of Fluid Mechanics. Vol 284. p. 257-274.

Copyright 1994 Cambridge University Press.


An experimental and theoretical investigation of low Reynolds number, high subsonic Mach number, compressible gas flow in channels is presented. Nitrogen, helium, and argon gases were used. The channels were microfabricated on silicon wafers and were typically 100 μm wide, 104 μm long, and ranged in depth from 0.5 to 20 μm. The Knudsen number ranged from 10-3 to 0.4. The measured friction factor was in good agreement with theoretical predictions assuming isothermal, locally fully developed, first-order, slip flow.



Date Posted: 17 August 2010

This document has been peer reviewed.