Departmental Papers (MEAM)

Document Type

Journal Article

Date of this Version

December 2007


Copyright 2007 IEEE. Reprinted from Microwave Magazine, IEEE, Volume 8, Issue 6, December 2007, pages 61-75.

This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of the University of Pennsylvania's products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to By choosing to view this document, you agree to all provisions of the copyright laws protecting it.


Next-generation military and civilian communication systems will require technologies capable of handling data/ audio, and video simultaneously while supporting multiple RF systems operating in several different frequency bands from the MHz to the GHz range [1]. RF microelectromechanical/nanoelectromechanical (MEMS/NEMS) devices, such as resonators and switches, are attractive to industry as they offer a means by which performance can be greatly improved for wireless applications while at the same time potentially reducing overall size and weight as well as manufacturing costs.


micromechanical devices, micromechanical resonators, microswitches, telecommunication, MEMS devices, NEMS devices, RF microelectromechanical devices, RF nanoelectromechanical devices, RF systems, civilian communication systems, diamonds, military communication systems, resonators, switches



Date Posted: 14 February 2008

This document has been peer reviewed.