Standard Operating Procedures
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Publication Raith EBPG5200+ Electron Beam Lithography Standard Operating Procedure(2023-11-22) Barth, David SSOP for the Raith EBPG5200+ Electron Beam Lithography WriterPublication Anatech SCE-108 Barrel Asher standard operating procedure(2022-08-01) Azadi, MohsenPublication Magnetron Sputtering Explorer14 standard operating procedure(2021-11-02) Yamamoto, HiromichiExplorer14 standard operating procedurePublication Oxford PlasmaLab 80 Plus RIE standard operating procedure(2021-11-01) Azadi, MohsenPublication Cambridge Nanotech S200 ALD standard operating procedure(2021-10-01) Azadi, MohsenPublication Standard Operating Procedures of Tools in Quattrone Nanofabrication Facility(2015-04-18) Yamamoto, HiromichiPublication Oxford PlasmaLab 100 PECVD standard operating procedure(2022-11-01) Azadi, MohsenPublication Filmetrics Profilm3D (MET-05) Standard Operating Procedure(2023-04-01) Barth, David SStandard Operating Procedure for the Filmetrics Profilm3D Optical Profilometer/White Light InterferometerPublication Lesker PVD75 E-beam/Thermal Evaporator (PVD-02) Standard Operating Procedure(2023-01-04) Barth, David S; Röhr, Jason A.Standard Operating Procedure for the Lesker PVD75 E-beam/Thermal Evaporator (PVD-02) located at the Quattrone Nanofabrication Facility within the Singh Center for Nanotechnology at the University of PennsylvaniaPublication RENA Compass SRD standard operating procedure(2022-12-22) Keenan, KyleSOP for RENA Compass Spin Rinse Dryer Stack in QNF
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