Nanoscaled Piezoelectric Aluminum Nitride Contour- Mode Resonant Sensors

Loading...
Thumbnail Image
Penn collection
Departmental Papers (ESE)
Degree type
Discipline
Subject
Electrical and Computer Engineering
Engineering
Funder
Grant number
License
Copyright date
Distributor
Related resources
Contributor
Abstract

This paper reports on a new class of nanoscaled piezoelectric aluminum nitride contour-mode resonant sensors (CMR-S) that have been developed for the gravimetric detection of volatile organic chemicals (VOC). The use of the CMR-S and its scaling for the making of large arrays of detectors is justified in terms of the superior sensitivity and limit of detection (LOD ~ zg/μm2) that this technology attains with respect to any other available acoustic device. The choice of a novel functionalization layer based on ss-DNA is introduced as an effective way to selectively detect multiple VOCs without altering the electromechanical characteristics of the resonator. Experimental results confirming the advantages of scaling the device dimensions and its frequency of operation in terms of improved LOD and measurement speed are presented. Furthermore, preliminary data showing selective detection of dymethyl-methylphosphonate (DMMP) and dinitroluene (DNT) (with LOD in the order of ppt) are reported.

Advisor
Date of presentation
2010-11-01
Conference name
Departmental Papers (ESE)
Conference dates
2023-05-17T05:55:48.000
Conference location
Date Range for Data Collection (Start Date)
Date Range for Data Collection (End Date)
Digital Object Identifier
Series name and number
Volume number
Issue number
Publisher
Publisher DOI
Journal Issue
Comments
Suggested Citation: Piazza, Gianluca; Rinaldi, Matteo; Zuniga, Chiara; , "Nanoscaled piezoelectric aluminum nitride contour-mode resonant sensors," Sensors, 2010 IEEE , vol., no., pp.2202-2207, 1-4 Nov. 2010. ©2010 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Recommended citation
Collection