Departmental Papers (ESE)


In this work a nano-enabled gravimetric chemical sensor prototype based on single-stranded DNA (ss-DNA) decorated single-walled carbon nanotubes (SWNT) as nano-functionalization layer for Aluminun Nitride (AIN) contour-mode resonant-MEMS gravimetric sensors has been demonstrated. Two resonators fabricated on the same silicon chip and operating at different resonance frequencies, 287 and 450 MHz, were functionalized with this novel bio-coating layer to experimentally prove the capability of two distinct single strands of DNA bound to SWNT to enhance differently the adsorption of volatile organic compounds such as dinitroluene (DNT, simulant for explosive vapor) and dymethyl-methylphosphonate (DMMP, a simulant for nerve agent sarin). The introduction of this bio-coating layer addresses the major drawbacks of recovery time (50% recovery in less than 29 seconds has been achieved) and lack of selectivity associated with gas sensor based on polymers and pristine carbon nanotube functionalization layers.

Document Type

Conference Paper

Date of this Version



Copyright 2009 IEEE. Reprinted from:
Zuniga, C.; Rinaldi, M.; Khamis, S.M.; Jones, T.S.; Johnson, A.T.; Piazza, G., "DNA-Decorated Carbon Nanotubes as Sensitive Layer for AlN Contour-Mode Resonant-MEMS Gravimetric Sensor," Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on , vol., no., pp.320-323, 25-29 Jan. 2009 URL:

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carbon nanotubes, chemical sensors, density measurement, DNA, carbon nanotubes, contour-mode resonant-MEMS gravimetric sensor, nano-enabled gravimetric chemical sensor prototype, sensitive layer



Date Posted: 18 June 2009