Departmental Papers (ESE)

Abstract

This paper reports on the first demonstration of multi-frequency (176, 222, 307, and 482 MHz) oscillators based on piezoelectric AlN contour-mode MEMS resonators. All the oscillators show phase noise values between –88 and –68 dBc/Hz at 1 kHz offset and phase noise floors as low as –160 dBc/Hz at 1 MHz offset. The same Pierce circuit design is employed to sustain oscillations at the 4 different frequencies, while the oscillator core consumes at most 10 mW. The AlN resonators are currently wirebonded to the integrated circuit realized in the AMIS 0.5 μm 5 V CMOS process. This work constitutes a substantial step forward towards the demonstration of a single-chip multi-frequency reconfigurable timing solution that could be used in wireless communications and sensing applications.

Document Type

Journal Article

Date of this Version

September 2008

Start Page

402

Last Page

407

Comments

Copyright 2008 IEEE. Reprinted from 2008 IEEE International Frequency Control Symposium, May 2008, pages 402-407.

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Keywords

pierce oscillator, multi-frequency oscillator, AlN contour-mode resonator, microelectromechanical systems (MEMS), piezoelectric resonator

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Date Posted: 20 November 2008