Departmental Papers (ESE)


This paper reports on the first demonstration of multi-frequency (176, 222, 307, and 482 MHz) oscillators based on piezoelectric AlN contour-mode MEMS resonators. All the oscillators show phase noise values between –88 and –68 dBc/Hz at 1 kHz offset and phase noise floors as low as –160 dBc/Hz at 1 MHz offset. The same Pierce circuit design is employed to sustain oscillations at the 4 different frequencies, while the oscillator core consumes at most 10 mW. The AlN resonators are currently wirebonded to the integrated circuit realized in the AMIS 0.5 μm 5 V CMOS process. This work constitutes a substantial step forward towards the demonstration of a single-chip multi-frequency reconfigurable timing solution that could be used in wireless communications and sensing applications.

Document Type

Journal Article

Date of this Version

September 2008

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Copyright 2008 IEEE. Reprinted from 2008 IEEE International Frequency Control Symposium, May 2008, pages 402-407.

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pierce oscillator, multi-frequency oscillator, AlN contour-mode resonator, microelectromechanical systems (MEMS), piezoelectric resonator



Date Posted: 20 November 2008