This paper reports experimental results on a new class of single-chip multi-frequency channel-select filters based on self-coupled aluminum nitride (A1N) contour-mode piezoelectric resonators. For the first time, two-port AlN contour-mode resonators are connected in series and electrically coupled using their intrinsic capacitance to form multi-frequency (94 – 271 MHz), narrow bandwidth (~0.3%), low insertion loss (~4 dB), high off-band rejection (~60 dB) and extremely linear (IIP3 ~110 dBm) channel-select filters. This novel technology enables multi-frequency, high-performance and small form factor filter arrays and makes a single-chip multi-band RF solution possible in the near future.
Date of this Version
aluminum nitride (A1N), contour-mode resonator, channel-select filter, microelectromechanical systems (MEMS)
Date Posted: 04 February 2008
This document has been peer reviewed.