Departmental Papers (ESE)


This paper reports experimental results on a new class of single-chip multiple-frequency (up to 236 MHz) filters that are based on low motional resistance contour-mode aluminum nitride piezoelectric micromechanical resonators. Rectangular plates and rings are made out of an aluminum nitride layer sandwiched between a bottom platinum electrode and a top aluminum electrode. For the first time, these devices have been electrically cascaded to yield high performance, low insertion loss (as low as 4 dB at 93MHz), and large rejection (27 dB at 236 MHz) micromechanical bandpass filters. This novel technology could revolutionize wireless communication systems by allowing cofabrication of multiple frequency filters on the same chip, potentially reducing form factors and manufacturing costs. In addition, these filters require terminations (1 kOmega termination is used at 236 MHz) that can be realized with on-chip inductors and capacitors, enabling their direct interface with standard 50-Omega systems.

Document Type

Journal Article

Date of this Version

April 2007


Copyright 2007 IEEE. Reprinted from Journal of Microelectromechanical Systems, Volume 16, Issue 2, April 2007, pages 319-328.

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aluminide nitride (AIN), contour-mode resonators, ladder filters, microelectromechanical systems (MEMS), filters, microelectromechanical systems (MEMS) resonators, piezoelectric resonators



Date Posted: 20 June 2007

This document has been peer reviewed.