Are diamonds a MEMS' best friend?

dc.contributor.authorAuciello, Orlando
dc.contributor.authorPacheco, Sergio
dc.contributor.authorSumant, Anirudha V
dc.contributor.authorGudeman, Chris
dc.contributor.authorSampath, Suresh
dc.contributor.authorDatta, Arindom
dc.contributor.authorCarpick, Robert W
dc.contributor.authorAdiga, Vivekananda P
dc.contributor.authorZurcher, Peter
dc.contributor.authorMa, Zhenqiang
dc.contributor.authorYuan, Hao-Chih
dc.contributor.authorCarlisle, John A
dc.contributor.authorKabius, Bernd
dc.contributor.authorHiller, Jon
dc.contributor.authorSrinivasan, Sudarsan
dc.date2023-05-17T01:57:32.000
dc.date.accessioned2023-05-22T23:46:33Z
dc.date.available2023-05-22T23:46:33Z
dc.date.issued2007-12-01
dc.date.submitted2008-02-14T13:09:54-08:00
dc.description.abstractNext-generation military and civilian communication systems will require technologies capable of handling data/ audio, and video simultaneously while supporting multiple RF systems operating in several different frequency bands from the MHz to the GHz range [1]. RF microelectromechanical/nanoelectromechanical (MEMS/NEMS) devices, such as resonators and switches, are attractive to industry as they offer a means by which performance can be greatly improved for wireless applications while at the same time potentially reducing overall size and weight as well as manufacturing costs.
dc.description.commentsCopyright 2007 IEEE. Reprinted from Microwave Magazine, IEEE, Volume 8, Issue 6, December 2007, pages 61-75. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of the University of Pennsylvania's products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.
dc.identifier.urihttps://repository.upenn.edu/handle/20.500.14332/39844
dc.legacy.articleid1142
dc.legacy.fulltexturlhttps://repository.upenn.edu/cgi/viewcontent.cgi?article=1142&context=meam_papers&unstamped=1
dc.source.issue137
dc.source.journalDepartmental Papers (MEAM)
dc.source.peerreviewedtrue
dc.source.statuspublished
dc.subject.othermicromechanical devices
dc.subject.othermicromechanical resonators
dc.subject.othermicroswitches
dc.subject.othertelecommunication
dc.subject.otherMEMS devices
dc.subject.otherNEMS devices
dc.subject.otherRF microelectromechanical devices
dc.subject.otherRF nanoelectromechanical devices
dc.subject.otherRF systems
dc.subject.othercivilian communication systems
dc.subject.otherdiamonds
dc.subject.othermilitary communication systems
dc.subject.otherresonators
dc.subject.otherswitches
dc.titleAre diamonds a MEMS' best friend?
dc.typeArticle
digcom.contributor.authorAuciello, Orlando
digcom.contributor.authorPacheco, Sergio
digcom.contributor.authorSumant, Anirudha V
digcom.contributor.authorGudeman, Chris
digcom.contributor.authorSampath, Suresh
digcom.contributor.authorDatta, Arindom
digcom.contributor.authorisAuthorOfPublication|email:carpick@seas.upenn.edu|institution:University of Pennsylvania|Carpick, Robert W
digcom.contributor.authorAdiga, Vivekananda P
digcom.contributor.authorZurcher, Peter
digcom.contributor.authorMa, Zhenqiang
digcom.contributor.authorYuan, Hao-Chih
digcom.contributor.authorCarlisle, John A
digcom.contributor.authorKabius, Bernd
digcom.contributor.authorHiller, Jon
digcom.contributor.authorSrinivasan, Sudarsan
digcom.identifiermeam_papers/137
digcom.identifier.contextkey427431
digcom.identifier.submissionpathmeam_papers/137
digcom.typearticle
dspace.entity.typePublication
relation.isAuthorOfPublication42e1b852-23a9-4afe-8a9f-78cbdcb56872
relation.isAuthorOfPublication42e1b852-23a9-4afe-8a9f-78cbdcb56872
relation.isAuthorOfPublication.latestForDiscovery42e1b852-23a9-4afe-8a9f-78cbdcb56872
upenn.schoolDepartmentCenterDepartmental Papers (MEAM)
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