Synthesis and Post-growth Doping of Silicon Nanowires

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Byon, Kumhyo
Tham, Douglas
Johnson, Alan T
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High quality silicon nanowires (SiNWs) were synthesized via a thermal evaporation method without the use of catalysts. Scanning electron microscopy and transmission electron microscopy showed that SiNWs were long and straight crystalline silicon with an oxide sheath. Field effect transistors (FETs) were fabricated to investigate the electrical transport properties. Devices on as-grown material were p-channel with channel mobilities 1 - 10 cm2 V-1 s-1. Post-growth vapor doping with bismuth converted these to n-channel behavior.

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2005-11-01
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Postprint version. Published in Applied Physics Letters, Volume 87, Issue 19, Article 193104, November 7, 2005, 5 pages. Publisher URL: http://dx.doi.org/10.1063/1.2128070
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