Departmental Papers (CBE)

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Journal Article

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The role of entropy in the thermodynamic properties of small interstitial clusters in crystalline silicon is investigated using an empirical potential. It is shown that both vibrational and configurational entropies are potentially important in setting the properties of small silicon interstitial clusters and, in particular, contribute to the formation of “magic” sizes that exhibit special stability, which have been inferred by experimental measurements of dopant diffusion. The results suggest that a competition between formation energy and entropy of small clusters could be linked to the selection process between various self-interstitial precipitate morphologies observed in ion-implanted crystalline silicon.


Suggested Citation:
Kapur, S.S. and T. Sinno. (2008). "Entropic origins of stability in silicon interstitial clusters." Applied Physics Letters. 93, 221911.

© 2008 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Applied Physics Letters and may be found at



Date Posted: 11 January 2011

This document has been peer reviewed.