Author(s)

Zisong NieFollow

Document Type

Technical Report

Date of this Version

4-27-2015

Facility

Quattrone Nanofabrication Facility

Creative Commons License

Creative Commons Attribution-Share Alike 4.0 License
This work is licensed under a Creative Commons Attribution-Share Alike 4.0 License.

Keywords

Deposition Rate, Surface Roughness, Morphology, Film Stress, Al, Explorer14

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Date Posted: 27 April 2015