Temperature dependence of ALD SiO2 growth

Loading...
Thumbnail Image
Penn collection
Tool Data
Quattrone Nanofabrication Facility
Degree type
Discipline
Subject
Atomic Layer Deposition SiO2
Funder
Grant number
Copyright date
Distributor
Related resources
Contributor
Abstract
Advisor
Date Range for Data Collection (Start Date)
Date Range for Data Collection (End Date)
Digital Object Identifier
Series name and number
Publication date
2015-04-25
Volume number
Issue number
Publisher
Publisher DOI
Journal Issue
Comments
Recommended citation
Collection