Standard Operating Procedures
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Publication ABM Mask Aligner standard operating procedure(2021-11-15) Johnston, EricThe ABM mask aligner is a manual top-side mask aligner that can accommodate up to 100mm substrates. It can also be used for aligning PDMS components for PDMS-to-PDMS bonding.Publication Cambridge Nanotech S200 ALD standard operating procedure(2021-10-01) Azadi, MohsenPublication Publication Elionix ELS-7500EX Electron Beam Lithography Standard Operating Procedure(2022-05-01) Barth, David SPublication Anatech SCE-108 Barrel Asher standard operating procedure(2022-08-01) Azadi, MohsenPublication Lesker PVD75 E-beam Evaporator (PVD-04) Standard Operating Procedure(2022-10-05) Jones, David J.; Röhr, Jason A.Standard Operating Procedure for the Lesker PVD75 E-beam Evaporator (PVD-04) located at the Quattrone Nanofabrication Facility within the Singh Center for Nanotechnology at the University of PennsylvaniaPublication Lesker PVD75 E-beam/Thermal Evaporator (PVD-02) Standard Operating Procedure(2023-01-04) Barth, David S; Röhr, Jason A.Standard Operating Procedure for the Lesker PVD75 E-beam/Thermal Evaporator (PVD-02) located at the Quattrone Nanofabrication Facility within the Singh Center for Nanotechnology at the University of PennsylvaniaPublication PlasmaPro 100 Cobra ICP standard operating procedure(2022-01-01) Azadi, MohsenPublication Filmetrics Profilm3D (MET-05) Standard Operating Procedure(2023-04-01) Barth, David SStandard Operating Procedure for the Filmetrics Profilm3D Optical Profilometer/White Light InterferometerPublication Raith EBPG5200+ Electron Beam Lithography Standard Operating Procedure(2023-11-22) Barth, David SSOP for the Raith EBPG5200+ Electron Beam Lithography Writer