Document Type

Technical Report

Date of this Version

7-14-2017

Facility

Quattrone Nanofabrication Facility

Abstract

To test adhesion of under-exposed SU-8 structures with the wafer surface by Post-Development (PD) Bake.

Creative Commons License

Creative Commons Attribution-Share Alike 4.0 License
This work is licensed under a Creative Commons Attribution-Share Alike 4.0 License.

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Date Posted:14 July 2017

 

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