Power Handling and Related Frequency Scaling Advantages in Piezoelectric AlN Contour-Mode MEMS Resonators

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Departmental Papers (ESE)
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Electrical and Electronics
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This paper reports on the analytical modeling and experimental verification of the mechanically-limited power handling and nonlinearity in piezoelectric aluminum nitride (AlN) contour-mode resonators (CMR) having different electrode configurations (thickness field excitation, lateral field excitation, one-port and two-port configurations) and operating at different frequencies (177-3047 MHz). Despite its simplicity, the one-dimensional analytical model fits the experimental behavior of AlN CMRs in terms of power handling capabilities. The model and experiment also confirm the advantage of scaling (i.e. miniaturizing) the AlN CMRs to higher frequencies at which higher critical power density can be more easily attained up to values in excess of 10 μW/μm3.

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2009-09-01
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Departmental Papers (ESE)
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2023-05-17T03:49:09.000
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Suggested Citation: Chengjie Zuo, Matteo Rinaldi, and Gianluca Piazza. "Power Handling and Related Frequency Scaling Advantages in Piezoelectric AlN Contour-Mode MEMS Resonators" 2009 IEEE International Ultrasonics Symposium (IUS 2009) (2009): 1187-1190. ©2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
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